Rainbow Research Optics, Inc. offers a variety of mirrors for handling the many ranges and high powers of excimer lasers. These mirrors cover the laser lines of ArF (λ = 193 nm) and XeF (λ = 352 nm). These external cavity, high-energy excimer laser mirrors have been designed to withstand high pulsed powers. Each optic provides better than λ/10 surface flatness and surface finishes of 10-5 scratch-dig.

Features:

  • ArF and XeF Excimer Laser Line Mirrors
  • High Damage Threshold

Excimer Laser Mirrors, ArF(193nm)
Excimer Laser Mirrors, KrF(248nm)
Excimer Laser Mirrors, XeCl(308nm)
Excimer Laser Mirrors, XeF(351-353nm)
High Energy Excimer / He-Ne Laser Mirrors

Excimer Laser Mirrors, ArF(193nm) / KrF(248nm)
Substrate material: BK7
S1 Surface Figure: λ/10 @ 633nm
S1 Surface Quality: 10-5 laser quality
S2 Surface Quality: Commercial Finish
Diameter Tolerance: +0.0/-0.20 mm
Thickness Tolerance: ±0.25 mm
Min. Reflectance: ArF ≥ 97.0%    KrF ≥ 99.0%
Clear Aperture: >85% of diameter
Chamfer: 0.3mm at 45 typical
Damage Thredold: 1 j /cm2  10ns pulse
Adhesion Threshold: Per MIL-C-675A
Excimer Laser Mirrors, XeCl(308nm) / XeF(351-353nm)
Substrate material: UV fused Silica or BK7
S1 Surface Figure: λ/10 @ 633nm
S1 Surface Quality: 10-5 laser quality
S2 Surface Quality: Commercial Finish
Diameter Tolerance: +0.0/-0.20 mm
Thickness Tolerance: ±0.25 mm
Min. Reflectance: ArF ≥ 97.0%    XeF ≥ 99.0%
Clear Aperture: >85% of diameter
Chamfer: 0.3mm at 45 typical
Damage Thredold: 1 j /cm2  10ns pulse
Adhesion Threshold: Per MIL-C-675A
High Energy Excimer / He-Ne Laser Mirrors
Substrate material: UV fused Silica
S1 Surface Figure: λ/10 @ 633nm
S1 Surface Quality: 10-5 laser quality
Diameter Tolerance: +0.0/-0.20 mm
Thickness Tolerance: ±0.25 mm
Wedge: < 3 arc min.
Clear Aperture: >85% of diameter
Chamfer: 0.3mm at 45 typical
Adhesion Threshold: Per MIL-C-675A